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ICPCVD設備

ICPCVD設備

Applications

MEMS
  • Low Power
  • Room&Low Temp
  • Normal Temp
  • Stress Tuneable
  • High Quality
  • High SC
  • Specific Optical Films
POWER
  • Stress Tuneable
  • Room&Low Temp
  • Stress Tuneable
  • High SC
III-V(RF)
  • Low Damage
  • Low Power
  • Room&Low Temp
  • Normal Temp
  • Stress Tuneable
  • High Quality
  • High SC
  • Specific Optical Films
IC
  • Stress Tuneable
  • Room&Low Temp
  • Normal Temp
  • High Quality
  • Low BOE
AP
  • Stress Tuneable
  • Room&Low Temp
  • Normal Temp
  • High SC
  • High Gap Filling
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